<P><B>Abstract</B></P> <P>For application to all-solid-state thin film batteries, lithium boron phosphorus oxynitride (LiBPON) thin films were fabricated by RF magnetron sputtering technique of lithium borate (Li<SUB&...
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https://www.riss.kr/link?id=A107459311
2019
-
SCOPUS,SCIE
학술저널
434-439(6쪽)
0
상세조회0
다운로드다국어 초록 (Multilingual Abstract)
<P><B>Abstract</B></P> <P>For application to all-solid-state thin film batteries, lithium boron phosphorus oxynitride (LiBPON) thin films were fabricated by RF magnetron sputtering technique of lithium borate (Li<SUB&...
<P><B>Abstract</B></P> <P>For application to all-solid-state thin film batteries, lithium boron phosphorus oxynitride (LiBPON) thin films were fabricated by RF magnetron sputtering technique of lithium borate (Li<SUB>3</SUB>BO<SUB>3</SUB>) and lithium phosphate (Li<SUB>3</SUB>PO<SUB>4</SUB>) target under N<SUB>2</SUB> atmosphere. To investigate the mixed former effect upon the LiBPON thin films, we prepared various films with controlled B and P contents. The LiBPON thin film formulation with nearly equal B and P contents showed the highest room-temperature lithium ionic conductivity of 3.52 × 10<SUP>−6</SUP> S cm<SUP>−1</SUP> and the lowest activation energy of 48.24 kJ mol<SUP>−1</SUP> owing to the mixed former effect, the increased lithium content and nitridation. Infrared spectra of the glass thin films achieved two dominant peaks corresponding to BO<SUB>3</SUB> <SUP>3−</SUP> and PO<SUB>4</SUB> <SUP>3−</SUP> unit. N1s spectra were analyzed by X-ray photoelectron spectroscopy that the increased ionic conductivities observed were related to the formation of triply coordinated nitrogen.</P> <P><B>Highlights</B></P> <P> <UL> <LI> Lithium boron phosphorus oxynitride (LiBPON) were fabricated by RF magnetron sputtering. </LI> <LI> LiBPON shows the conductivity of 3.52 × 10<SUP>−6</SUP> S cm<SUP>−1</SUP> and the activation energy of 0.50 eV. </LI> <LI> Due to the mixed former effect and the nitridation effect the ionic conductivity is increased. </LI> </UL> </P>