Measurement of probe current is used to align the column and to check proper current for image. The data is compared with data of other system and could be standard data for developing the system. In the measurement for aligning the column, scanning c...
Measurement of probe current is used to align the column and to check proper current for image. The data is compared with data of other system and could be standard data for developing the system. In the measurement for aligning the column, scanning control signal is only utilized. The current for image is changed by aperture size. Faraday cup is one of tools for doing this and is used in this paper. It is composed of mesh and a cup to be connected to signal line. The current is measured by a pico-amperemeter.