EBE 법으로 제작한 Se/CdS 이종접합의 특성 = Characteristics of Se/CdS Heterojunction Fabricated by EBE Method

다국어 초록 (Multilingual Abstract)

CdS and Se thin films were deposited on slide glass by EBE method respectively and surface morphology, crystal structure, electrical and optical properties were investigated by substrate temperature and annealing. The deposited CdS film was well fabricated with cubic structure at substrate temperature of 150℃, Se film was deposited with noncrystal structure until substrate temperature of 100℃, but Se film was grown with monoclinic structure at substrate temperature of 150℃. And so. after annealing at 150℃ for 15min, noncrystalline Se was proved to be hexagonal structure. Finally, the maximum output of Se/CdS heterojunction at 5000 lux was 4 mW/㎠ and maximum spectral sensitivity was represented at 585nm.