Effect of Sintering Temperature on the Characteristics of Zn0.99Li0.01O Thin Film on Si Substrate

다국어 초록 (Multilingual Abstract)

Lithium-doped zinc oxide (Zn0.99Li0.01O) film was manufactured by the sol-gel method using uniform and stable solution of zinc acetate dehydrate and lithium acetate dehydrate in methanol. Films were deposited by spin-coating using spinner between 4500 and 5000 rpm on silicon substrates. The prepared samples were sintered at various temperatures (600 o C ~ 1000 o C) in the air. The structural, morphological, and optical properties of the prepared lithium-doped ZnO films were investigated. The XRD pattern of Zn0.99Li0.01O film demonstrated the hexagonal wurzite structure. However, new crystal phase was discovered at a sintering temperature of 800 o C. New peak was found near 2θ = 22.6o in XRD patterns. The peak is thought to be the (101) plan in SiO2 cristobalite structure. Moreover, another new crystal phase related to Li2SiO5 was occurred at a sintering temperature of 900 o C. From XRD analysis, it was confirmed that C axis was decreased and the stress was increased, as sintering temperatures was increased from 600 o C to 900 o C. In cathodo luminescence (CL) data, zinc oxide usually appears ultra violet and green emission. However, the green emission did not appear in all these samples used in this study. The ultra violet emission showed red shift from 600 o C to 800 o C in the CL spectrum as the sintering temperature was increased. The phenomenon of the red shift can be explained in Burstein-Moss effect. At sintering temperature of 700 o C, the intensity of ultra-violet emission was the largest and full width at half maximum (FWHM) was the smallest.

참고문헌 (Reference)

1 C. Y. Tsay, 36 : 1791-, 2010

2 R. Yousefi, 39 : 1371-, 2012

3 J. B. Webb, 39 : 640-, 1981

4 M. J. Brett, 1 : 352-, 1983

5 H. Sato, 246 : 86-, 1994

6 S. H. Jeong, 516 : 5586-, 2008

7 A. Sa’aedi, 3 (3): 226-, 2013

8 Q. You, 644 : 528-, 2015

9 A. Tripathi, 149 : 361-, 2014

10 C. E. Kim, 518 : 6304-, 2010

11 W. M. cho, 145 : 884-, 2014

12 Y. J. Zeng, 89 : 042106-, 2006

13 J. G. Lu, 89 : 112113-, 2006

14 Fujihara, 21 : 2109-, 2001

15 D. K. Hwang, 86 : 151917-, 2005

16 Y. I. Alivov, 83 : 4719-, 2003

17 G. Yi, 64 : 2717-, 1988

18 R. G. Singh, 151 : 701-, 2011

19 E. A. G. Engku Ali, 2018 (2018): 75-, 2018

20 O. F. Schirmer, 8 : 1559-, 1970

21 M. K. Puchet, 14 : 2220-, 1996

22 Y. Y. Liu, 63 : 2597-, 2009

23 Y. Chen, 84 : 3912-, 1998

24 P. S. Xu, 199 : 286-, 2003

25 J. Zhao, 253 : 6255-, 2007

26 김유성, "ZnO/Ag/SnO2 적층박막의 두께 변화에 따른 전기적, 광학적 특성 연구" 대한금속·재료학회 57 (57): 324-327, 2019

27 Seon Yeong Park, "Instrument-Free and Autonomous Generation of H2O2 from Mg–ZnO/Au Hybrids for Disinfection and Organic Pollutant Degradations" 대한금속·재료학회 24 (24): 657-663, 2018

28 김진배, "Effect of Sintering Temperature on the Characteristics of Undoped ZnO Thin Films Fabricated by Using the Sol-Gel Process" 한국물리학회 54 (54): 1640-1643, 2009

29 김진수, "Dielectric and Electrical Properties of Li-doped ZnO Films" 한국물리학회 58 (58): 640-644, 2011

30 Do Kyu Lee, "Annealing Effect on the Electrical and the Optical Characteristics of Undoped ZnO Thin Films Grown on Si Substrates by RF Magnetron Sputtering" 한국물리학회 51 (51): 1378-1382, 2007