비대칭 스퍼터링에 의한 TiAIN/CrN 나노 다층 박막의 합성 및 특성 분석에 관한 연구

다국어 초록 (Multilingual Abstract)

In this work a multi-layered nanostructured TiAlN/CrN superlattice coatings was synthesized using closed-field unbalanced magnetron sputtering method and the relationships between their superlattice period (1), micro-structure, hardness and elastic modulus were investigated. In addition, wear test at 500℃ and oxidation resistance test at 900℃ were performed 10 investigate high temperature properties of these thin films. The coatings were characterized in terms of microstructure and mechanical properties by transmission electron microscopy (TEM) and nano-indentation test. Results from TEM analysis showed that superlattice periods was inversely proportional to the jig rotation speed. The maximum hardness and elastic modulus of 37 ㎬ and 375 ㎬ were observed at superalttice period of 6.1 ㎚ and 4.4 ㎚, respectively. An higher value of microhardness from TiAlN/CrN thin films than either TiAlN (30 ㎬) or CrN (26 ㎬) was noted while the elastic modulus was approximately an average of TiAlN and CrN films. These enhancement effects in superlattice films could be attributed to the resistance to dislocation glide across interface between the CrN and TiAlN layers. Much improved plastic deformation resistance (H³/E²) of 0.36 from TiAlN/CrN coatings was observed, compared with 0.15 and 0.16 from TiAlN and CrN, respectively. Also the wear resistance at 500℃ was largely increased than those of single TiAlN and CrN coatings and TiAlN/CrN coatings showed much reduced weight gain after exposure at 900℃ for 20 hours.

목차 (Table of Contents)

• Abstract
• 1. 서론
• 2. 실험방법
• 3. 결과 및 분석
• 4. 결론
• 후기
• 참고문헌