1 김흥배, "집속이온빔을 이용한 마이크로/나노스케일에서의 실리콘 금형 가공 특성" 한국정밀공학회 28 (28): 966-974, 2011
2 Matsui, S., "Three-dimensional nanostructure fabrication by focused ion beam chemical vapour deposition, Springer Handbook of Nanotechnology, Part A" 211-229, 2010
3 Ivor, I., "The Physics of Micro/Nano-fabrication" Plenum Press 1992
4 Tseng, A. A., "Recent Developments in Micromilling using Focused Ion Beam Technology" 14 (14): R15-R34, 2004
5 Frey, L., "Nanoscale Effects in Focused Ion Beam Processing" 76 (76): 1017-1023, 2003
6 Kim, H. B., "Level set approach for the simulation of focused ion beam processing on the micro/nano scale" 18 (18): 265307-, 2007
7 Kaesmaier, R., "Ion Projection Lithography: Progress of European MEDEA & International Program" 53 (53): 37-45, 2000
8 Orloff, J., "Handbook of Charged Particle Optics" CRC Press 129-160, 2009
9 Kim, H. B., "Full three-dimensional simulation of focused ion beam micro/nanofabrication" 18 (18): 245303-, 2007
10 Fu, Y., "Fabrication of threedimensional microstructures by two-dimensional slice by slice approaching via focused ion beam milling" 22 (22): 1672-1678, 2004
1 김흥배, "집속이온빔을 이용한 마이크로/나노스케일에서의 실리콘 금형 가공 특성" 한국정밀공학회 28 (28): 966-974, 2011
2 Matsui, S., "Three-dimensional nanostructure fabrication by focused ion beam chemical vapour deposition, Springer Handbook of Nanotechnology, Part A" 211-229, 2010
3 Ivor, I., "The Physics of Micro/Nano-fabrication" Plenum Press 1992
4 Tseng, A. A., "Recent Developments in Micromilling using Focused Ion Beam Technology" 14 (14): R15-R34, 2004
5 Frey, L., "Nanoscale Effects in Focused Ion Beam Processing" 76 (76): 1017-1023, 2003
6 Kim, H. B., "Level set approach for the simulation of focused ion beam processing on the micro/nano scale" 18 (18): 265307-, 2007
7 Kaesmaier, R., "Ion Projection Lithography: Progress of European MEDEA & International Program" 53 (53): 37-45, 2000
8 Orloff, J., "Handbook of Charged Particle Optics" CRC Press 129-160, 2009
9 Kim, H. B., "Full three-dimensional simulation of focused ion beam micro/nanofabrication" 18 (18): 245303-, 2007
10 Fu, Y., "Fabrication of threedimensional microstructures by two-dimensional slice by slice approaching via focused ion beam milling" 22 (22): 1672-1678, 2004
11 Vasile, M. J., "Depth control of focused ion-beam milling a numerical model of the sputtered process" 17 (17): 3085-3090, 1999
12 Patterson, N., "Controlled fabrication of nanopores using a direct focused ion beam approach with back face particle detection" 19 (19): 235304-, 2008
13 Eckstein, W., "Computer simulation of Ion-Solid Interactions" Springer-Verlag 1991
14 Young, R. J., "Characteristics of gas-assisted focused ion beam etching" 11 (11): 234-241, 1993
15 Smith, R., "Atom & ion collision in solids and at surfaces" Cambridge University Press 1997