This paper power supply design and control method of plasma system used in LCD and semiconducter cleaning processes. both poles in the load included capacitors for using a multijet method for increase efficient the cleaning processes. Therefore, Occur...
This paper power supply design and control method of plasma system used in LCD and semiconducter cleaning processes. both poles in the load included capacitors for using a multijet method for increase efficient the cleaning processes. Therefore, Occur unbalanced current at the power supply output current because both poles capacitors. Occured unbalanced current be improved design and control method that using series L and PWM Duty control, its be proved a stable supply of power.