패턴이 있는 TFT-LCD 패널의 결함검사를 위하여 근접패턴비교와 경계확장 알고리즘을 이용한 자동광학검사기(AOI) 개발

다국어 초록 (Multilingual Abstract)

This paper presents an overall image processing approach of defect inspection of patterned TFT-LCD panels for the real manufacturing process. A prototype of AOI(Automatic Optical Inspection) system which is composed of air floating stage and multi line scan cameras is developed. Adjacent pattern comparison algorithm is enhanced and used for pattern elimination to extract defects in the patterned image of TFT-LCD panels. New region merging algorithm which is based on border expansion is proposed to identify defects from the pattern eliminated defect image. Experimental results show that a developed AOI system has acceptable performance and the proposed algorithm reduces environmental effects and processing time effectively for applying to the real manufacturing process.

목차 (Table of Contents)

• Abstract
• Ⅰ. Introduction
• Ⅱ. Image Processing for Defect Inspection
• Ⅲ. New Defect Blob Merging Algorithm : Border Expansion
• Ⅳ. Experiments
• Ⅴ. Conclusion
• References

참고문헌 (Reference)

1 A. Resenfeld, "Sequential Operations in Digital Picture Processing" 13 (13): 471-494, 1966

2 E. B. Goldstein, "Sensation & Perception" Sigma Press 2004

3 Richard O. Duda, "Pattern Classification" Wiley Interscience 2001

4 H.Freeman, "On the encoding of arbitrary geometric configuration" EC-10 : 260-268, 1961

5 E. R. Davies, "Machine Vision : Theory Algorithms Practicalities" Academic Press 1997

6 T. M. Mitchell, "Machine Learning" McGraw-Hill 1997

7 L. Juwei, "K. N. Plataniotis (2003) Face Recognition using LDA-based algorithms" 14 : 195-200, 2003

8 W. Tomlinson, "In-Line SEM based ADC for Advanced Process Control" 131-137, 2000

9 M. Sonka, "Image Processing Analysis and Machine Vision" PWS Publishing 1999

10 K. Nakashima, "Hybrid Inspection System for LCD Color Filter Panels" 1994

11 X. Li, "Group direction difference chain codes for the representation of the border" Digital and Optical Shape Representation and Pattern Recognition 1998

12 J. Gil, "Efficient Dilation, Erosion, Opening and Closing Algorithms" 24 (24): 1606-1617, 2002

13 C.-J. Lu, "Defect inspection of patterned thin film transistor-liquid crystal display panels using a fast sub-image-based singular value decomposition" 42 (42): 4333-4351, 2004

14 R. M. Haralick, "Computer and Robot Vision" Addison-Wesley Publishing 1992

15 S. M. Sokolov, "Automatic vision system for final test of liquid crystal display" 1992

16 D.-M. Tsai, "Automatic defect inspection of patterned thin film transistor-liquid crystal display(TFT-LCD) panels using one-dimensional Fourier reconstruction and wavelet decomposition" 43 (43): 4589-4607, 2005

17 G. Renyan, "Automatic Defect Inspection and Classification for PDP" University of Waterloo 2003

18 H. Yoda, "An Automatic Wafer Inspection System Using Pipelined Image Processing Techniques" 10 (10): 4-15, 1988

19 Burges, "A Tutorial on Support Vector Machines for Pattern Recognition" 2 (2): 121-167, 1998

20 H. Onishi, "A Parrern Defect Inspection Method by Parallel Grayscale Image Comparison without Precise Image Alignment" 2002