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https://www.riss.kr/link?id=A3316523
2000
-
500
KCI등재후보
학술저널
248-255(8쪽)
0
상세조회0
다운로드다국어 초록 (Multilingual Abstract)
Penning type sputtering system which has two opposed targets was implemented and the physical characteristics of the deposited carbon nitride films were investigated. When argon ratio was reduced and nitrogen ratio was increased in the sputtering gas ...
Penning type sputtering system which has two opposed targets was implemented and the physical characteristics of the deposited carbon nitride films were investigated. When argon ratio was reduced and nitrogen ratio was increased in the sputtering gas mixture, Fe was less sputtered. The grain size of grown carbon nitride films was distributed from 150Å to 250Å. As nitrogen partial pressure increases, growth rate and nitrogen incorporation in the film increases.
캡슐형 백금저항온도계 국제비교를 위한 네온 , 산소 , 아르곤 , 수은 및 물의 삼중점 실현
마이크로 열 센서용 측온저항체 온도센서의 제작 및 특성
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