Two types of thin film SnO2 gas sensors, which are Pd-SnO2-Pt-SiO2-Si and P.-(Sb-SnO2)-Pd-SiO2-Si, were explored. The influence of Sb additives on the gas sensitivity of SnO2 film was investigated. The SEM analysis showed that the surface morphology o...
Two types of thin film SnO2 gas sensors, which are Pd-SnO2-Pt-SiO2-Si and P.-(Sb-SnO2)-Pd-SiO2-Si, were explored. The influence of Sb additives on the gas sensitivity of SnO2 film was investigated. The SEM analysis showed that the surface morphology of the thin film gas sensor is columnar tyre. The temperature dependence of resistance change of SnO2 was examined. The gas sensing characteristics of the devices were investigated. The SnO2 samples doped simultaneously with Pt and Sb show a higher sensitivity to CO than the SnO2 samples doped with Pd. The sensitivity of the SnO2 doped with Pt and Sb to CO gas was 26% at 300℃