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다국어 초록 (Multilingual Abstract)

We investigated the optical and the electrical properties of Al-doped ZnO (AZO) films grown on c-plane sapphire by varying the growth temperature in an atomic layer deposition system. High-resolution xray ω/2θ scans revealed that the (002) peak of the AZO film was clearly developed with increasing growth temperature from 115°C to 235°C. From a surface analysis, we found that the surface grain size of the AZO film increased with growth temperature. In addition, the minimal resistivity (1.21 × 10−3 Ω·cm) and the maximum mobility (19.32 cm2/v-s) were obtained at a growth temperature of 195°C, consistent with the results of PL intensity. These results indicate that the electrical and the optical properties of the AZO films were significantly affected by the growth temperature. From the findings of this study, we believe that the electrical and the optical properties of AZO films can be significantly improved by increasing the crystal domain size of AZO films.

참고문헌 (Reference)

1 K. L. Chopra, 102 : 1-, 1983

2 D. S. Ginley, 25 : 15-, 2000

3 J. W. Elam, 150 : 339-, 2003

4 H. J. Kim, 517 : 2563-, 2009

5 D. M. Bagnall, 70 : 2230-, 1997

6 C. H. Ahn, 519 : 747-, 2010

7 M. Chen, 85 : 212-, 2001

8 M. Hiramatsu, 16 : 669-, 1998

9 J. -H. Bae, 516 : 7866-, 2008

10 T. -H. Fang, 10 : 405-, 2010

1 K. L. Chopra, 102 : 1-, 1983

2 D. S. Ginley, 25 : 15-, 2000

3 J. W. Elam, 150 : 339-, 2003

4 H. J. Kim, 517 : 2563-, 2009

5 D. M. Bagnall, 70 : 2230-, 1997

6 C. H. Ahn, 519 : 747-, 2010

7 M. Chen, 85 : 212-, 2001

8 M. Hiramatsu, 16 : 669-, 1998

9 J. -H. Bae, 516 : 7866-, 2008

10 T. -H. Fang, 10 : 405-, 2010

11 H. Kim, 74 : 3444-, 1999

12 V. Donderis, 10 : 1387-, 2010

13 T. W. Kim, 253 : 1917-, 2006

14 X. Jiang, 83 : 1875-, 2003

15 H. Kim, 377 : 798-, 2000

16 Yung-Kuan Tseng, "Effects of UV Assistance on the Properties of Al-Doped ZnO Thin Films Deposited by Sol-Gel Method" 대한금속·재료학회 9 (9): 771-773, 2013

17 임영수, "Effects of SiO2 Interlayer on Electrical Properties of Al-Doped ZnO Films under Bending Stress" 대한금속·재료학회 8 (8): 375-379, 2012

18 Jeung Hun Park, "Deposition-Temperature Effects on AZO Thin Films Prepared by RF Magnetron Sputtering and Their Physical Properties" 한국물리학회 49 (49): 584-588, 2006

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연월일	이력구분	이력상세
	학술지등록	한글명 : Electronic Materials Letters 외국어명 : Electronic Materials Letters
2023	평가예정	해외DB학술지평가 신청대상 (해외등재 학술지 평가)
2020-01-01	평가	등재학술지 유지 (해외등재 학술지 평가)
2013-10-01	평가	등재학술지 선정 (기타)
2011-01-01	평가	등재후보학술지 유지 (기타)
2009-12-29	학회명변경	한글명 : 대한금속ㆍ재료학회 -> 대한금속·재료학회
2008-01-01	평가	SCIE 등재 (신규평가)