용액공정을 이용한 열처리된 산화아연 박막의 투명한 박막 트랜지스터 구현을 위한 전사방법 개발 = Development of transfer method for transparent thin film transistor of heat-treated zinc oxide thin film by solution process

다국어 초록 (Multilingual Abstract)

Recently, Thin-film transistors (TFTs) are fundamental building blocks for state-of-the-art microelectronics, such as flat-panel displays and system-on-glass. Zinc oxide thin films have the advantage that they can grow at low temperature and can obtain high charge movility. Also the zinc oxide thin film can be used to control the resistance according to the oxygen content, so it is very easy to obtain the desired physical properties. In this paper, we fabricated a zinc oxide thin film on a polished copper substrate through a solution process, then improved the crystallinity through a geat treatment porcess, and studied to transfer it on a flexible substrate after the heat treatment was completed.

참고문헌 (Reference)

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