1 R. P. Feynman, "The Feynman Lectures on Physics" Addison Wesley 1977
2 R. P. Feynman, "The Feynman Lectures on Physics" dison Wesley 1977
3 M. A. Lieberman, "Principles of Plasma Discharges and Materials Processing" Wiley 1994
4 D. J. Cooperberg, "Plasma Sources Sci" 7 (7): 1998
5 L. Tonks, "Phys" 37 (37): 1931
6 H. Y. Kim, "J. Korean Phys" 49 (49): 2006
7 V. P. T. Ku, "J. Appl" 84 (84): 1998
8 V. P. T. Ku, "J. Appl" 84 (84): 1998
9 I. S. Lee, "D B Graves and M A Lieberman, Plasma Sources Sci" 17 (17): 2008
10 A.D.Richards, "Appl. Phys" 50 (50): 1987
1 R. P. Feynman, "The Feynman Lectures on Physics" Addison Wesley 1977
2 R. P. Feynman, "The Feynman Lectures on Physics" dison Wesley 1977
3 M. A. Lieberman, "Principles of Plasma Discharges and Materials Processing" Wiley 1994
4 D. J. Cooperberg, "Plasma Sources Sci" 7 (7): 1998
5 L. Tonks, "Phys" 37 (37): 1931
6 H. Y. Kim, "J. Korean Phys" 49 (49): 2006
7 V. P. T. Ku, "J. Appl" 84 (84): 1998
8 V. P. T. Ku, "J. Appl" 84 (84): 1998
9 I. S. Lee, "D B Graves and M A Lieberman, Plasma Sources Sci" 17 (17): 2008
10 A.D.Richards, "Appl. Phys" 50 (50): 1987
11 D. P. Lymberopoulos, "Appl" 73 (73): 1993
12 J. D. P. Passchier, "Appl" 74 (74): 1993