박형 알루미늄 고체축전기의 제조 및 평가 : 양극산화피막의 임피단스 특성에 관하여 = Impedance Properties of Solid Aluminum Capacitors

다국어 초록 (Multilingual Abstract)

The frequency dependences of equivalent series capacitance and resistance were analyzed to determine the impedance properties of anodic oxide films on aluminum. Dielectric oxide film was formed by anodizing in a aqueous solution of 3% ammonium borate galvanostatically and potentiostatically. The solid electrolyte was applied on anodic oxide films by pyrolysis of manganese nitrate. The impedance properties of anodic oxide films on aluminum well coincided with the dielectric theory of barrier oxide layers. Heat treatment of the oxide films in hydrogen and argon atmosphere reduced capacitance and dissipation factor. It is attributed to the reduced resistance of outmost oxygen excess layer inγ-Al₂O₃ film. During heat treatment in air and pyrolysis, however, increased the resistance and dissipation factor.