Micromechanical structures such as cantilever beams and bridge array (~μm thick, 100~500 μm long) were fabricated by formation of porous silicon layer.
The beam array of n/p samples have irregular etched surface and cusp. On the otherhand, beams of...
Micromechanical structures such as cantilever beams and bridge array (~μm thick, 100~500 μm long) were fabricated by formation of porous silicon layer.
The beam array of n/p samples have irregular etched surface and cusp. On the otherhand, beams of n/n^(+)/n structure have clear etched surface and no cusp.