Low-Temperature Al and B Codoped ZnO Transparent Conductive Oxide Films Deposited at various Deposition Powers

다국어 초록 (Multilingual Abstract)

The increasing research interest in ZnO films is not only due to the films’ electrical properties but
also their optical characteristics making these films an alternative to ITO thin films. We prepared
an Al and B codoped ZnO target. We deposited Al and B-codoped ZnO (AZOB) transparent
conductive oxide (TCO) thin films on flexible substrates by DC sputter at room temperature. For
comparison of the film properties, AZOB films were deposited on glass substrates by using the same
conditions as the films deposited on flexible substrates. The range of power of the deposition of
the AZOB TCO thin films varied from 50 to 200 W. The resistivity of the AZOB TCO thin film
deposited on the flexible substrate at room temperature was 1.14 × 10−3 Ω-cm. The average
transmittance of the AZOB TCO thin film was over 80 % in the visible range. Also the properties
of AZOB films on the flexible substrates were compared to the properties of AZO film on flexible
substrates at optimum condition.

다국어 초록 (Multilingual Abstract)

The increasing research interest in ZnO films is not only due to the films’ electrical properties but
also their optical characteristics making these films an alternative to ITO thin films. We prepared
an Al and B codoped ZnO target. We deposited Al and B-codoped ZnO (AZOB) transparent
conductive oxide (TCO) thin films on flexible substrates by DC sputter at room temperature. For
comparison of the film properties, AZOB films were deposited on glass substrates by using the same
conditions as the films deposited on flexible substrates. The range of power of the deposition of
the AZOB TCO thin films varied from 50 to 200 W. The resistivity of the AZOB TCO thin film
deposited on the flexible substrate at room temperature was 1.14 × 10−3 Ω-cm. The average
transmittance of the AZOB TCO thin film was over 80 % in the visible range. Also the properties
of AZOB films on the flexible substrates were compared to the properties of AZO film on flexible
substrates at optimum condition.

참고문헌 (Reference)

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3 Q. Ma, 82 : 9-, 2008

4 L. Wang, 69 : 527-, 2008

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6 이규일, "Structural and Electrical Properties of Al-Doped ZnO and Al, B-Codoped ZnO Films Deposited on Flexible Substrate" 한국물리학회 53 (53): 2407-2410, 2008

7 Chongmu Lee, "Preparation of Transparent Conducting Ga-Doped ZnO and Al-Doped ZnO Bilayers by Using r.f. Magnetron Sputtering with ZnO Buffer Layers on Polymer Substrates" 한국물리학회 50 (50): 586-589, 2007

8 Jeung Hun Park, "Deposition-Temperature Effects on AZO Thin Films Prepared by RF Magnetron Sputtering and Their Physical Properties" 한국물리학회 49 (49): 584-588, 2006

9 Jeung Hun Park, "A Study of Transparent Conductive Aluminum-Doped Zinc Oxide Fabricated on a Flexible Polyethersulphone(PES) Substrate" 한국물리학회 51 (51): 1968-1972, 2007

10 Jeung Hun Park, "A Study of Transparent Conductive Aluminum-Doped Zinc Oxide Fabricated on a Flexible Polyethersulphone(PES) Substrate" 한국물리학회 51 (51): 1968-1972, 2007