연마제 재활용을 위한 분급장치 개발에 관한 연구 = A Study on the Development of Classifier for Recycling of Abrasive

다국어 초록 (Multilingual Abstract)

For process improvement and cutting down on expenses in solar cell industry, it is necessary to improve recycling process of wafer manufacturing. In this research, a study is introduced to develop classifier which is for recycling of abrasive. First of all, recycling process of wafer manufacturing is analyzed. And then, 3 steps of experiments such as oil removal, impurities removal and classification were executed. For the classification of slurry, a classifier is designed and manufactured . From experiments, it is verified that ultra sound vibration and flux are very important factors for classification. By experiencing the recycling processes and making devices, the technique can be initiated industry if needed such as decreasing waste and cutting down on expenses.

참고문헌 (Reference)

1 나원식, "화학적 처리를 적용한 Slurry 분리 및 비교분석 검증 연구" 한국디지털콘텐츠학회 14 (14): 35-40, 2013

2 나원식, "태양전지 Wafering Slurry 재생기술 개발에 관한 연구" 한국항행학회 14 (14): 426-431, 2010

3 김종영, "Wafer Sawing 공정의 폐슬러리로부터 금속 실리콘 회수에 관한 연구" 한국세라믹학회 48 (48): 189-194, 2011

4 김상연, "SVM 기반 실리콘 웨이퍼 마이크로크랙의 분류성능 분석" 한국정밀공학회 33 (33): 715-721, 2016