PECVD 공정을 이용한 후면 패시베이션 및 결정질 실리콘 태양전지 적용에 관한 연구 = A Study on the Application of Thin Film Passivation and Crystalline Silicon Solar Cells Using PECVD Process

다국어 초록 (Multilingual Abstract)

In this study, SiNx and Al2O3 thin film was manufactured using PECVD deposition process and applied to crystalline silicon solar cells, resulting in 16.7% conversion efficiency. The structural improvement experiment of the rear electrode resulted in a 1.7% improvement in conversion efficiency compared to the reference cell by reducing the recombination rate of minority carriers and increasing the carrier lifetime by forming a passivation layer consisting of SiNx and Al2O3 thin films through the PECVD process.

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