나노인덴터에 의한 ITO / Glass 박막재의 기계적 특성 = Mechanical Properties of ITO / Glass Thin Film by Indentation Method

참고문헌 (Reference)

1 "Study on In2O3-SnO2 Transparent and Conductive Films Prepared by D.C. Sputtering Using High Density Ceramic Targets" 445 : 229-234, 2003

2 "Properties of ITO Films Deposited by R.F.-PERTE on Unheated Polymer Substrates-Dependence on Oxygen Partial Pressure" 427 : 215-218, 2003

3 "Principal and Application of Nanoindentation Test" 42 (42): 48-54, 2002

4 "Physics of Very Thin ITO Conducting Films with High Transparency Prepared by DC Magnetron Sputtering" 270 : 37-42, 1995

5 "PET에 성막된 ITO 박막재의 O2가스 분압비에 의한 광학적 및 전자파차폐 특성" 278-282, 2005

6 "On the Measurement of Stress-Strain Curves by Spherical Indentation" 398-399 : 331-335, 2001

7 "NI 법에 의한 기계적 특성에 미치는 ZnO 박막의 기판재의 영향" 342-346, 2004

8 "Investigation of Mechanical Properties of Transparent Conducting Oxide Thin Films" 443 : 60-65, 2003

9 "ITO Thin Films Deposited at Low Temperatures Using a Kinetic Energy Controlled Sputter-Deposition Techique" 411 : 36-41, 2002

10 "A study on the Deposition of ITO Films at Low temperature by Inclination Opposite Target type DC Magnetron Sputtering Method" 17 (17): 1229-1234, 2003