집속이온빔장치와 주사전자현미경을 이용한 박막 트랜지스터 구조불량의 3차원 해석 = Three Dimensional Reconstruction of Structural Defect of Thin Film Transistor Device by using Dual-Beam Focused Ion Beam and Scanning Electron Microscopy

다국어 초록 (Multilingual Abstract)

In this paper we have constructed three dimensional images and examined structural failure on thin film transistor (TFT) liquid crystal display (LCD) by using dual-beam focused ion beam (FIB) and IMOD software. Specimen was sectioned with dual-beam focused ion beam. Series of two dimensional images were obtained by scanning electron microscopy. Three dimensional reconstruction was constructed from them by using IMOD software. The short defect between Gate layer and Data layer was found from the result of three dimensional reconstruction. That phenomena made the function of the gate lost and data signal supplied to the electrode though the Drain continuously. That signal made continuous line defect. The result of the three dimensional reconstruction, serial section, SEM imaging by using the FIB will be the foundation of the next advanced study.

참고문헌 (Reference)

1 김진규, "전자토모그래피의 정량적 분석에서 대물렌즈 조리개의 영향" 한국현미경학회 38 (38): 285-291, 2008

2 장 진, "박막트랜지스터-액정디스플레이 (TFT-LCD: Thin-Film Transistor Liquid Crystal Display" 37 (37): 25-28, 1997

3 권오경, "고해상도 TFT-LCD 구동방법" 4 (4): 16-20, 2003

4 문지영, "Three Dimensional Reconstruction of Cellular Structure in Drosophila Retina Using High Voltage Electron Microscopy" 한국현미경학회 39 (39): 185-189, 2009

5 김정현, "TFT-LCD의 고개구율 기술 동향" 2 (2): 36-44, 2001

6 Wu HZ, "Subsurface damage analysis by TEM and 3D FIB crack mapping in alumina and alumina/5vol.%SiC nanocomposites" 51 : 149-163, 2003

7 이석열, "Fourier transform infrared spectroscopy를 이용한 SiNx박막의 수소농도 연구" 한국진공학회 17 (17): 215-219, 2008

8 Groeber MA, "3D reconstruction and characterization of polycrystlline microstructures using a FIB-SEM system" 57 : 259-273, 2006

9 Inkson B, "3D determination of grain shape in a FeAl-based nanocomposite by 3D FIB tomography" 45 : 753-758, 2001