정적형 유량계를 이용한 소닉노즐 유출계수 교정 방법에 관한 연구 = Calibration of Discharge Coefficient of Sonic Nozzle Using CVFM

다국어 초록 (Multilingual Abstract)

Sonic nozzles have been a standard device for measurement of steady state gas flow, as recommended in ISO 9300. This paper introduces two sonic nozzles of diameter ${\Phi}$ 0.03 mm and ${\Phi}$ 0.2 mm precisely machined according to ISO 9300. The constant volume flow meter(CVFM), readily set up in the Vacuum center of KRISS. was used to calibrate the discharge coefficients of both nozzles. The calibration results were shown to determine them within the 3% expanded measurement uncertainty. Calibrated sonic nozzles were found to be applicable for precision measurement of steady state gas flow in the vacuum process in the ranges of 0.6~1,800 cc/min. Those flow conditions are equivalent to the fine gas flow with Reynolds numbers of 26~12,100. Those encouraging results confirm that calibrated sonic nozzles enable precision measurement of extremely low gas flow encountered very often in th vacuum processes. Both calibrated sonic nozzles are proven to provide the precision measurement of the volume flow rate of the dry vacuum pump within one percent difference in reference to CVFM. Calibrated sonic nozzles are applied to a new 'in-situ and in-field' equipment designed to measure the volume flow rate of vacuum pumps in the semiconductor and flat display processes. Furthermore, they can provide other applications to flow control devices in vacuum, such as MFC, etc.

참고문헌 (Reference)

1 "한국표준과학연구원 교정 절차서, 상압가스 유량측정 표준시스템-피스톤 푸루버, C-10-4-0092-2002"

2 "한국표준과학연구원 교정 절차서, 상압가스 유량측정 표준시스템-벨 푸루버, C-10-4-0090-2002"

3 배석희, "진공공학" 한국경제신문 2000

4 "음속노즐의 임계 압력비에 대한 저 레이놀즈 수의 영향" 24 : 1535-1539, 2000

5 "Low Vacuum Generation and Control on BIEN Technology: Mass Flow and Dry Pumping Characteristics" 277 : 1000-1015, 2005

6 "ISO 9300: Measurement of gas flow by means of critical flow venturi nozzles, (1990)"