Piezoelectric device is popularly used in movement system which is operated in submicro range. But because of it's big nonlinearity, it is very difficult to obtain ultramicro-positioning. So this paper proposes new control algorithm using fuzzy neur...
Piezoelectric device is popularly used in movement system which is operated in submicro range. But because of it's big nonlinearity, it is very difficult to obtain ultramicro-positioning. So this paper proposes new control algorithm using fuzzy neural network. The developed controller advanced positioning performance on real-time