피에조 이송기구를 이용한 초소형 선반

다국어 초록 (Multilingual Abstract)

Micro-machine tool is essential in the micro/meso cutting for the sake of saving of space, resources, and energy. In this research, a micro-turning lathe was fabricated with piezoelectric feed drive mechanism, and motion of each axis 'was generated by stepwise mechanism with two piezo actuators. The resolution to drive the axis was 0.05 ㎛ and position accuracy less than 2 ㎛ was assured. From the positioning experiment, piezo feed mechanism is good enough for the micro machine tools. Many turning experiments were carried out with diamond-cutting tools to evaluate cutting capability of a machine tool. Continuous flow type chip could be obtained even if the cutting speed was very low due to small diameter of workpiece. However, thorough investigation about machineability in micro/meso cutting is inevitable to assure high quality surface roughness in micro machine tool.

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