매개변수 추정법을 이용한 압축응력 및 온도에 따른 PZT 세라믹의 압전물성 분석 = Analysis of Piezoelectric Properties of PZT Ceramics under Compressive Stress and Temperature using Parametric Estimation Method

다국어 초록 (Multilingual Abstract)

In this study, the overall piezoelectric properties of lead zirconate titanate (Pb(Zr,Ti)O3, hereafter PZT) ceramic were optimized according to compressive stress and temperature changes. Based on this, a BLT (Bolt-clamped Langevin Type) piezoelectric device was designed, and the reliability of the piezoelectric properties was verified. PZT ceramics are used as key materials in various piezoelectric devices due to their high dielectric constant, mechanical strength, and thermal stability. However, in actual applications, the piezoelectric properties of PZT ceramics react sensitively to external compressive stress and temperature changes, affecting the performance and reliability of the devices. Therefore, to accurately design piezoelectric devices using finite element analysis (FEM), it is essential to apply piezoelectric properties that reflect changes in these external factors. To measure the piezoelectric properties under varying external effects, the impedance characteristics of PZT ceramics were measured under various compressive stress and temperature conditions using the resonance method. The parameters that minimize the difference between the experimentally obtained impedance characteristics and the impedance characteristics obtained from FEM analysis were determined, and the final piezoelectric properties were derived through parameter estimation method. These optimized piezoelectric properties were then used in the design and fabrication of the BLT device, and their characteristics were analyzed to verify reliability. As a result, the resonance frequencies of the radial mode and thickness mode increased by up to 10% and 6%, respectively, as the compressive stress increased, and the dielectric constant also increased with rising compressive stress. Regarding temperature changes, the resonance frequencies of the radial mode and thickness mode increased linearly with rising temperature, and the dielectric constant significantly increased as well. The representative optimized piezoelectric properties obtained through parameter estimation are as follows: when the compressive stress was 40 MPa, the piezoelectric constants -d31 and d33 showed the highest values of 147 pC/N and 375 pC/N, respectively, indicating that KICET-PZT8 exhibits high piezoelectric performance under 40 MPa of compressive stress. When the temperature increased to 200°C, the piezoelectric constants -d31 and d33 increased to 136 pC/N and 408 pC/N, respectively. The optimized piezoelectric properties were validated by comparing the characteristics of the BLT device, which was designed and fabricated through FEM analysis. The BLT device showed that the designed resonance frequency was very close to the actual resonance frequency, confirming the reliability of the optimized properties. The BLT device operated at a resonance frequency of 122 kHz and achieved fine droplet spraying with an average particle size of 46 μm. Finally, when comparing the FEM analysis results, which applied the optimized piezoelectric properties derived through parameter estimation under 40 MPa of compressive stress, with the actual device measurements, the difference in resonance frequency was about 2 kHz. This demonstrates that the optimized piezoelectric properties provide more reliable data than those obtained through the resonance method.

목차 (Table of Contents)

• I. 서론 1
• II. 이론적 배경 4
• 1. 압전 세라믹 4
• 1) 개요 4
• 2) 압전 세라믹의 결정학적 특성 6
• 3) PZT 압전 세라믹 9
• 2. 압전물성에 대한 이론적 접근 14
• 3. 압전물성 평가 방법 20
• 4. 압축응력 및 온도가 PZT의 압전물성에 미치는 영향 30
• 5. FEM을 활용한 압전물성 분석 기법 32
• III. 압축응력 및 온도에 따른 PZT의 압전물성 분석 34
• 1. 서론 34
• 2. 실험 방법 36
• 1) PZT 시편 제작 36
• 2) 압축응력에 따른 PZT의 임피던스 특성 측정 38
• 3) 온도에 따른 PZT의 임피던스 특성 측정 40
• 4) PZT의 진동모드에 따른 주파수 42
• 5) PZT의 압전물성 계산 44
• 3. 결과 및 고찰 46
• 1) 압축응력에 따른 PZT의 임피던스 특성 분석 46
• 2) 압축응력에 따른 PZT의 압전물성 분석 51
• 3) 온도에 따른 PZT의 임피던스 특성 분석 60
• 4) 온도에 따른 PZT의 압전물성 분석 65
• 4. 결론 73
• IV. 매개변수 추정법을 이용한 PZT의 압전물성 최적화 75
• 1. 서론 75
• 2. 실험 방법 76
• 1) 매개변수 추정법을 이용한 PZT의 압전물성 추정 방법 76
• 3. 결과 및 고찰 82
• 1) 압축응력에 따른 PZT의 압전물성 82
• 2) 온도에 따른 PZT의 압전물성 89
• 4. 결론 95
• V. BLT 트랜스듀서 제작 및 물성 검증 97
• 1. 서론 97
• 2. 실험 방법 98
• 1) FEM을 이용한 BLT 트랜스듀서 설계 98
• 2) BLT 트랜스듀서 제작 및 특성 분석 104
• 3. BLT 트랜스듀서 제작 107
• 4. 결론 111
• VI. 결론 112
• 참고문헌 114

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