Analysis of the Dielectric Characteristics of In-Plane-Polarized Ferroelectric Transducers Using Interdigitated Electrodes

다국어 초록 (Multilingual Abstract)

The dielectric characteristics of in-plane-polarized feroelectric transducers are analyzed and an equivalent model is suggested. The geometric configuration of feroelectric transducers with interdigitated electrodes (IDE) is symmetricaly simplified and the electric field distribution is analyzed using the finite-element method (FEM). The FEM result shows that the field distribution of the inner feroelectric film between the electrodes is uniform in the in-plane direction and that the eects of the fields in the air and in the inner feroelectric film under the electrodes are negligible. A simplified in-plane equivalent model is derived from the results and the effectiveness of the model is verified by comparing a capacitance value calculated using the model with a simulated result from the FEM analysis and a computation of the energy of the system. The capacitance values are 1.66 and 1.61 pF, respectively. The dielectric characteristics of the fabricated in-plane-polarized lead-zirconate-titanate (PZT) transducers are also tested. The calculated result (3.42 nF) is close to the measured value (3.27 nF).

참고문헌 (Reference)

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