유도결합 열 플라즈마를 이용한 고순도 질화알루미늄 나노 분말 합성 = Synthesis of high purity aluminum nitride nanopowder by RF induction thermal plasma

다국어 초록 (Multilingual Abstract)

Aluminum nitride, which has outstanding properties such as high thermal conductivity and electrical resistivity, has been received a great attention as a substrate and packaging material of semiconductor devices. Since aluminum nitride has a high sintering temperature of 2173 K and its properties depends on the impurity level, it is necessary to synthesize high-purity and nano-sized aluminum nitride powders for the applications. In this research, we synthesized high purity aluminum nitride nanopowders from aluminum using RF induction thermal plasma system. Sheath gas (NH3) flow was controlled to establish the synthesis condition of high purity aluminum nitride nanopowders. The obtained aluminum nitride nanopowders were evaluated by XRD, SEM, TEM, BET, FTIR and N-O analysis.

참고문헌 (Reference)

1 강승민, "무종자결정 상에 성장된 AlN 결정의 형태학적 연구" 한국결정성장학회 22 (22): 265-268, 2012

2 FactSage, "actSage, software program, version 6.2"

3 N.S. Kanhe, "Understandingthe growth of micro and nano-crystalline AlN bythermal plasma process" 339 : 36-, 2012

4 B.H. Li, "Ultrafine AIN andAl-AlN powders: preparation by DC arc plasma andthermal treatment" 9 : 156-, 1991

5 A.V. Virkar, "Thermodynamicand kinetic effects of oxygen removal on thethermal conductivity of aluminum nitride" 72 : 2031-, 1989

6 G.A. Slack, "The intrinsic thermal conductivity of AlN" 48 : 641-, 1987

7 C. Mandilas, "Synthesisof aluminum nanoparticles by arc plasma sprayunder atmospheric pressure" 178 : 22-, 2013

8 B.C. Di Lello, "Synthesisand characterization of nano-scale aluminum nitrideproduced from vapor phase" 15 : 67-, 2001

9 H. Ahn, "Synthesis of ultrafinepowders for aluminum nitride by DC thermal plasma" 29 : 45-, 1996

10 T. Yamakawa, "Synthesis of AlN nanopowder from c-Al2O3by reduction-nitridation in a mixture of NH3-C3H8" 89 : 171-, 2006

11 'H.D. Li, "Synthesis and infrared study of nanosizedaluminum nitride powders prepared by direct currentarc plasma" 102 : 8692-, 1998

12 C.H. Li, "Rapid preparation of aluminum nitride powdersby using microwave plasma" 542 : 78-, 2012

13 김태규, "RF-PECVD법에 의한 투명 다이아몬드상 탄소 박막 합성" 한국결정성장학회 22 (22): 190-193, 2012

14 S.H. Lee, "Preparation of nanometer AlN powders bycombining spray pyrolysis with carbothermal reductionand nitridation" 37 : 1967-, 2011

15 D. vollate, "Plasma synthesis of nanoparticles" 25 : 39-, 2007

16 P.C. Kong, "Plasma synthesis of ceramicpowders" 62 : 1809-, 1990

17 M. Yamada, "Nitridation of aluminum particles and formation processof aluminum nitride coatings by reactive RFplasma spraying" 515 : 4166-, 2007

18 R. Dolbec, "Nanopowders synthesisat industrial-scale production using the inductivelycoupled plasma technology" 1 : 672-, 2008

19 M.L. Panchula, "Nanocrystalline aluminumnitride: i, vapor-phase synthesis in a forced-flowreactor" 86 : 1114-, 2003

20 C. Papelis, "Measuring the specific surface area of natural andmanmade glasses: effect of formation process, morphology,and particle size" 215 : 221-, 2003

21 K. Etemadi, "Formation of aluminum nitrides in thermalplasmas" 11 : 41-, 1991

22 N. Hashimoto, "Effect of millingtreatment on the particle size in the preparation ofAIN powder from aluminum polynuclear complexes" 76 : 438-, 1993

23 M.C. Wang, "Effect of heattreatment on phase transformation of aluminum nitrideultrafine powder prepared by chemical vapor deposition" 210 : 487-, 2000

24 H. Wang, "Effect of additiveson self-propagating high-temperature synthesis of AlN" 21 : 2193-, 2001

25 T. Okada, "Direct nitridation of aluminum compacts at low temperature" 35 : 3105-, 2000

26 S.M. Oh, "Development of plasma processfor preparing ultrafine aluminum nitride" 6 : 1-, 2000

27 S.L. Chung, "A self-propagatinghigh-temperature synthesis method for synthesis of AlNpowder" 14 : 1928-, 1999