MOD법에 의한(Ba · Pb) TiO_3_ 박막 제조 및 특성에 대한 연구 = A Study on the(Ba · Pb) TiO_3_ Thin Film by MOD Process

다국어 초록 (Multilingual Abstract)

MOD(Metallo-Organic Decomposition) process was applied to form barium lead titanate thin film in which the barium was partly substituted by lead in order to evaluate the change of electric properties for microcircuits. MOCs(Metallo-Organic Compounds), such as barium 2-ethylhexanoate, barium neodecanoate, lead 2-ethylhexanoate and titanium dimethoxy di-2-ethylhexanoate, were synthesized and solubilities of them in common solvents were examined. Among the MOCs, only barium 2-ethylhexanoate was less soluble in p-xylene without pyridine and the other MOCs were soluble in only p-xylene. The formulations of barium lead titanate in which the barium was partly substituted by lead were deposited on the ITO/glass, Pt/SiO₂/Si and Pt/Ti/SiO₂/Si wafer by spin coating and the metallo-organic films were fired. The electrical properties of the films were measured and discussed.