고온 환경에서 세라믹 코팅 샤프트와 PTFE/PI 복합재의마찰 및 마모 특성 연구 = Study on the Friction and Wear Characteristics of Ceramic-Coated Shafts and PTFE/PI Composites in High-Temperature Environments

다국어 초록 (Multilingual Abstract)

This study investigates the tribological characteristics of PTFE/PI composite pins and ceramic-coated shafts under high-temperature conditions critical for precision components in semiconductor and display equipment. Lubricant-free, high-vacuum environments pose challenges in minimizing friction and wear, especially for seals and shafts that maintain vacuum integrity under thermal stress. Although PTFE/PI composites exhibit high hardness and heat resistance, their wear performance with ceramic-coated shafts remains underexplored. We employ a pin-on-cylinder setup to analyze friction and wear behavior and examines wear track morphology with a 3D confocal laser microscope. Results reveal that the friction coefficients of SUS304 and ceramic-coated shafts decrease with increasing temperature. Particle formation on SUS304 influences their tribological performance, resulting in abrasive wear. In contrast, the wear of ceramic coatings depend on their hardness. The surface condition of Cr2O3 coatings, including porosity, causes localized stress concentration, which accelerates wear. Al2O3-TiO2 coatings exhibit superior wear resistance at high temperatures due to their hardness and thermal stability, whereas Cr2O3 exhibits relatively higher wear rates due to lower hardness. However, Cr2O3 coatings cause less wear on PTFE/PI composite pins compared to Al2O3-TiO2 coatings, attributable to lower contact pressure and smoother surface roughness. These findings provide insights into material and coating selection for high-temperature applications, enhancing the durability and