Calculation of Effective Material Constant for PolySilicon Material by BEM

다국어 초록 (Multilingual Abstract)

This study is with respect to calculation of the efficient material constant of poly-silicon material using Boundary Element Method. As the MEMS field is gradually developed, reliability and safety of MEMS parts are an important factor in its industrial application. Generally, most of the MEMS parts consist of multi-grain poly-silicon of the orthotropic with random material direction. So it is important to analyze stress and know the material constant for multi-grain orthotropic material so that these parts are used for industrial field. Lattice model is used for micro structure evolution of the multi-grain. A system of numerical method is proposed to extract the effective young's modulus and poisson's ratio through the analysis of stress within the program. And the results analyzed by FEM are compared with those of FEM to verify that the program is sufficiently valid. Finally, we examined the true that it is possible for condition to create grains slowly or quickly to affect the stiffness and its distribution through repeated analysis.

목차 (Table of Contents)

• Abstract
• 1. Introduction
• 2. Multi-grain boundary element method
• 3. Shape information extraction of multi-grain
• 4. Extraction of effective material constant
• 5. Application to a multi-grain microstructure
• 6. Conclusion
• 7. Acknowledgement
• Reference