A neutral particle energy analyzer, which has the carbon stripping foil and the $90^{\circ}$ cylindrical electrostatic deflection plate, was designed and constructed for measuring of ion temperature in plasma. The energy calibration and energy resolut...
A neutral particle energy analyzer, which has the carbon stripping foil and the $90^{\circ}$ cylindrical electrostatic deflection plate, was designed and constructed for measuring of ion temperature in plasma. The energy calibration and energy resolution were studied in detail for a hydrogen ion at the $0.5{\sim}3.0\;keV$ energy using a duoplasmatron ion source. An energy of hydrogen ion to the deflection plate voltage at the peak ion count rate could be fitted by the expression $E_{o}(keV)$=3.83V(kV). The measured energy resolution, which was about 2 % at the energy of 3.0 keV and 9 % at the energy of 0.5keV, was better for the increased hydrogen ion energy. For the charge exchanged hydrogen atom due to the carbon stripping foil, the energy calibration, energy loss and resolution were measured to the $0.5{\sim}2.0{\mu}g/cm^{2}$ thickness of the carbon stripping foil. An energy of the charge exchanged hydrogen atom as a function of the deflection plate voltage and carbon foil thickness could be fitted by the expression $E_{o}(keV)=(0.53d+4.4){\cdot}V(kV)$. The energy loss was $0.23{\sim}0.89\;keV $ to the $0.5{\sim}2.0{\mu}g/cm^{2}$ carbon foil thickness and the $0.5{\sim}3.0\;keV$ energy of the incident neutral hydrogen atom, it could be fitted by the expression ${\Delta}E=(0.12d+0.27){\cdot}{E_{o}}^{1/2}(keV)$. The measured energy resolution for the neutral hydrogen atom, which was between 7 % and 35 % in this experiment region, was increased for the increasing neutral hydrogen atom energy and the decreasing carbon stripping foil thickness.