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    SCIE KCI등재

    Wear Characteristics of Atomic Force Microscope Tip

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    https://www.riss.kr/link?id=A76289833

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    Atomic Force Microscope (AFM) has been widely used in micro/nano-scale studies and applications for the last few decades. In this work, wear characteristics of silicon-based AFM tip was investigated. AFM tip shape was observed using a high resolution SEM and the wear coefficient was approximately calculated based on Archard's wear equation. It was shown that the wear coefficient of Si and Si₃N₄ tips were in the range of 10?¹~1O?³ and 1O?³~1O?⁴, respectively. Also, the effect of relative humidity and sliding distance on adhesion-induced tip wear was investigated. It was found that the tip wear has more severe for harder counter surface materials. Finally, the probable wear mechanism was analyzed from the adhesive and abrasive interaction point of view.
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    Atomic Force Microscope (AFM) has been widely used in micro/nano-scale studies and applications for the last few decades. In this work, wear characteristics of silicon-based AFM tip was investigated. AFM tip shape was observed using a high resolution ...

    Atomic Force Microscope (AFM) has been widely used in micro/nano-scale studies and applications for the last few decades. In this work, wear characteristics of silicon-based AFM tip was investigated. AFM tip shape was observed using a high resolution SEM and the wear coefficient was approximately calculated based on Archard's wear equation. It was shown that the wear coefficient of Si and Si₃N₄ tips were in the range of 10?¹~1O?³ and 1O?³~1O?⁴, respectively. Also, the effect of relative humidity and sliding distance on adhesion-induced tip wear was investigated. It was found that the tip wear has more severe for harder counter surface materials. Finally, the probable wear mechanism was analyzed from the adhesive and abrasive interaction point of view.

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    목차 (Table of Contents)

    • ABSTRACT
    • 1. Introduction
    • 2. Experimental Details
    • 3. Experimental Result
    • 4. Discussions
    • ABSTRACT
    • 1. Introduction
    • 2. Experimental Details
    • 3. Experimental Result
    • 4. Discussions
    • 5. Conclusions
    • Acknowledgement
    • References
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