Characteristics of a Titanium-oxide Layer Prepared by Plasma Electrolytic Oxidation for Hydrogen-ion Sensing

다국어 초록 (Multilingual Abstract)

The characteristics of a titanium oxide layer prepared using a plasma electrolytic oxidation (PEO) process were investigated, using an extended gate ion sensitive field effect transistor (EG-ISFET) to confirm the layer’s capability to react with hydrogen ions. The surface morphology and element distribution of the PEO-processed titanium oxide were observed and analyzed using field-emission scanning-electron microscopy (FE-SEM) and energy-distribution spectroscopy (EDS). The titanium oxide prepared by the PEO process was utilized as a hydrogen-ion sensing membrane and an extended gate insulator. A commercially available n-channel enhancement MOSFET (metal-oxide-semiconductor FET) played a role as a transducer. The responses of the PEO-processed titanium oxide to different pH solutions were analyzed. The output drain current was linearly related to the pH solutions in the range of pH 4 to pH 12. It was confirmed that the titanium-oxide layer prepared by the PEO process could feasibly be used as a hydrogen-ion-sensing membrane for EGFET measurements.

참고문헌 (Reference)

1 W. Bunjongpru, "Very low drift and high sensitivity of nanocrystal-TiO2 sensing membrane on pHISFET fabricated by CMOS compatible process" 267 : 206-211, 2013

2 P. Bergveld, "Thirty years of ISFETOLOGY : What happened in the past 30 years and what may happen in the next 30 years" 88 (88): 1-20, 2003

3 B. G. Streetman, "Solid State Electronic Devices" Pearson Prentice Hall 283-285, 2006

4 M. J. Schöning, "Recent advances in biologically sensitive field-effect transistors(BioFETs)" 127 (127): 1137-1151, 2002

5 S. Aliasghari, "Plasma electrolytic oxidation of titanium in a phosphate/silicateelectrolyte and tribological performance of the coatings" 316 : 463-476, 2014

6 X. Lu, "Plasma electrolytic oxidation coatings with particle additions – A review" 307-C : 1165-1182, 2016

7 Y. Cui, "Nanowire nanosensors for highly sensitive and selective detection of biological and chemical species" 293 (293): 1289-1292, 2001

8 E. Stern, "Label-free immunodetection with CMOS-compatible semiconducting nanowires" 445 : 519-522, 2007

9 X. Lu, "Influence of particle additions on corrosion and wear resistance of plasma electrolytic oxidation coatings on Mg alloy" 352 : 1-14, 2018

10 K. B. Parizi, "ISFET pH Sensitivity : Counter-Ions Play a Key Role" 7 : 41305(1)-41305(10), 2017

11 B. -K. Sohn, "ISFET glucose and sucrose sensors by using platinum electrode and photo-crosslinkable polymers" 41 (41): 7-11, 1997

12 Z. Yao, "Growth characteristics of plasma electrolytic oxidation ceramic coatings on Ti–6Al–4V alloy" 254 (254): 4084-4091, 2008

13 S. Xu, "Graphene foam field-effect transistor for ultra-sensitive label-free detection of ATP" 284 : 125-133, 2019

14 K. Gangwar, "Friction stir welding of titanium alloys : A review" 141 : 230-255, 2018

15 이상권, "Extended Gate를 이용한 MOSFET형 단백질 센서 제작 및 특성" 한국센서학회 16 (16): 104-109, 2007

16 L. -S. Park, "Effect of membrane structure on the performance of field-effect transistor potassium-sensitive sensor" 57 (57): 239-243, 1996

17 P. Bergveld, "Development of an Ion-Sensitive Solid-State Device for Neurophysiological Measurements" BME-17 : 70-71, 1970

18 M. Kaisti, "Detection principles of biological and chemical FET sensors" 98 : 437-448, 2017

19 A. L. Yerokhin, "Characterisation of oxide films produced by plasma electrolytic oxidation of a Ti-6Al-4V alloy" 130 (130): 195-206, 2000

20 V. Pachauri, "Biologically sensitive fieldeffect transistors : from ISFETs to NanoFETs" 60 (60): 81-90, 2016

21 R. R. Boyer, "An overview on the use of titanium in the aerospace industry" 213 (213): 103-114, 1996

22 B. -K. Sohn, "A new pH-ISFET based dissolved oxygen sensor by employing electrolysis of oxygen" 34 (34): 435-440, 1996