Thin films of InSb have been prepared by the zone-crystallization in ambient air of vacuum deposited layers on glass substrates using a simple hot-wire apparatus. The multiple zone passes can be used to provide additional purification of the InSb film...
Thin films of InSb have been prepared by the zone-crystallization in ambient air of vacuum deposited layers on glass substrates using a simple hot-wire apparatus. The multiple zone passes can be used to provide additional purification of the InSb films. The improved film quality is demonstrated by a film prepared with four zone passes at 1.4 ㎛/sec growth rate in a temperature gradient 300℃/㎝. The film with 1㎛ thickness has carrier cancentration and election mobility of 1.5×10??㎝-³ and 1.6×10⁴㎠/V.sec respectively at room temperature.