1 J. Klema, 1-, 1984
2 E. Kolawa, 1805 : 11-, 1992
3 E. Kolawa, 243-, 1970
4 W. C. Oliver, 7 : 1564-, 1968
5 S. I. Kim, 23 : 488-, 2009
6 S. I. Kim, 23 : 484-, 2009
7 I. N. Snedden, 3 : 47-, 1965
8 J. A. Thornton, "Semiconductor Materials and Process Technology Handbook" Noyes 329-, 1988
9 김수인, "Physical Properties of a HDI-PR after Dipping It in a Plasma-induced Liquid-vapor-activated (PLVA) PR Stripper As Measured by Using Nano-indentation" 한국물리학회 55 (55): 995-998, 2009
10 Soo In Kim, "Nitrogen Concentration Dependence of W-B-C-N Thin Films" 한국물리학회 50 (50): 489-492, 2007
1 J. Klema, 1-, 1984
2 E. Kolawa, 1805 : 11-, 1992
3 E. Kolawa, 243-, 1970
4 W. C. Oliver, 7 : 1564-, 1968
5 S. I. Kim, 23 : 488-, 2009
6 S. I. Kim, 23 : 484-, 2009
7 I. N. Snedden, 3 : 47-, 1965
8 J. A. Thornton, "Semiconductor Materials and Process Technology Handbook" Noyes 329-, 1988
9 김수인, "Physical Properties of a HDI-PR after Dipping It in a Plasma-induced Liquid-vapor-activated (PLVA) PR Stripper As Measured by Using Nano-indentation" 한국물리학회 55 (55): 995-998, 2009
10 Soo In Kim, "Nitrogen Concentration Dependence of W-B-C-N Thin Films" 한국물리학회 50 (50): 489-492, 2007