Sol-Gel 법을 이용한 칼슘-알루미네이트계 전자화물 박막의 제조와 특성 = Fabrication and properties of Calcium-aluminate electride thin films using by sol-gel process

다국어 초록 (Multilingual Abstract)

The Calcium-aluminate electride thin films on the quartz substrates was coated by sol-gel process. The crystallization of the C12A7 thin film was observed at $800^{\circ}C$ and high density C12A7 thin film was achieved on heat treatment at $1,200^{\circ}C$ for 1 hour. The reduction heat treatment of C12A7 thin film could be converted from insulator to conductor and the electrical conductivity was 120 S/cm in the C12A7 thin film heat treated at $1,200^{\circ}C$ with $H_2$ gas for 48 hours.

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