Application of the sheet electrode to enhance the geometric characteristics of micro-holes fabricated by electrochemical discharge machining

다국어 초록 (Multilingual Abstract)

The electrochemical discharge machining (ECDM) is an advanced machining technology used to fabricate micro-holes in glass. In this study, a sheet tool electrode is employed to increase electrolyte circulation in machining zone. The effect of pulse voltage, frequency, duty cycle, electrolyte concentration, and tool rotation speed on the geometric properties of micro-holes were evaluated. The results showed that when using a sheet tool electrode, the machining depth increased by 42.9 %, and the machining efficiency increased by 51.1 %, while the entrance diameter was reduced by 13.9 % than cylindrical tool electrode. Additionally, the heat-affected zone (HAZ) and entrance hole surface quality is improved. On the other hand, the Taguchi method was employed to analyze the relative importance of the machining parameters on geometric characteristics of micro-holes (i.e. drilled depth and entrance diameter of micro-holes). Finally, the entrance hole overcut of 148 μm was successfully fabricated with a depth of 2520 μm. It was discovered that using a sheet tool electrode is a simple method for machining a deep micro-hole with high machining efficiency and a range entrance hole diameter overcut that is acceptable.

참고문헌 (Reference)

1 J. Y. Lee, "Through-glass copper via using the glass reflow and seedless electroplating processes for wafer-level RF MEMS packaging" 23 (23): 085012-, 2013

2 S. Elhami, "Study of the current signal and material removal during ultrasonic-assisted electrochemical discharge machining" 92 (92): 1591-1599, 2017

3 G. Taguchi, "Quality engineering(taguchi methods)for the development of electronic circuit technology" 44 (44): 225-229, 1995

4 N. Kumar, "Micro-machining through electrochemical discharge processes : a review" 35 (35): 363-404, 2020

5 K. Essa, "Manufacturing of metallic microcomponents using hybrid soft lithography and micro-electrical discharge machining" 91 (91): 445-452, 2017

6 C. P. Cheng, "Magnetic field-assisted electrochemical discharge machining" 20 (20): 075019-, 2010

7 S. Amiri, "Magnetic field and ultrasonic aided laser drilling effect on Ti6Al4V microstructural characteristics" 35 (35): 1832-1841, 2020

8 R. Wüthrich, "Machining of non-conducting materials using electrochemical discharge phenomenon—an overview" 45 (45): 1095-1108, 2005

9 A. Srivastava, "Machining issues on electrochemical spark machining—a review" 26 : 2853-2861, 2020

10 R. K. Arya, "Investigations on quantification and replenishment of vaporized electrolyte during deep micro-holes drilling using pressurized flow-ECDM process" 266 : 217-229, 2019

11 N. Sabahi, "Investigating the effect of mixed alkaline electrolyte(NaOH + KOH)on the improvement of machining efficiency in 2D electrochemical discharge machining(ECDM)" 95 (95): 643-657, 2018

12 R. Wüthrich, "Improving the material removal rate in spark-assisted chemical engraving(SACE)gravity-feed micro-hole drilling" 16 (16): 28-31, 2006

13 T. Singh, "Experimental investigations of energy channelization behavior in ultrasonic assisted electrochemical discharge machining" 293 : 117084-, 2021

14 N. Sabahi, "Experimental investigation of surfactant-mixed electrolyte into electrochemical discharge machining(ECDM)process" 250 : 190-202, 2017

15 Y. Xu, "Experimental investigation of magnetohydrodynamic effect in electrochemical discharge machining" 142 : 86-96, 2018

16 C. K. Yang, "Enhancement of ECDM efficiency and accuracy by spherical tool electrode" 51 (51): 528-535, 2011

17 H. Kurafugi, "Electrical discharge drilling of glass" 16 : 415-419, 1968

18 T. Singh, "Developments in electrochemical discharge machining: a review on electrochemical discharge machining, process variants and their hybrid methods" 105 : 1-13, 2016

19 W. H. Yang, "Design optimization of cutting parameters for turning operations based on the Taguchi method" 84 (84): 122-129, 1998

20 K. Kolari, "Deep plasma etching of glass with a silicon shadow mask" 141 (141): 677-684, 2008

21 F. Mehrabi, "Application of electrolyte injection to the electro-chemical discharge machining(ECDM)on the optical glass" 255 : 665-672, 2018

22 J. E. Abu Qudeiri, "Advanced electric discharge machining of stainless steels: assessment of the state of the art, gaps and future prospect" 12 (12): 1-48, 2019

23 S. P. Leo Kumar, "A review on current research aspects in tool-based micromachining processes" 29 (29): 1291-1337, 2014