In this paper, the pumping performance of the multi-stage(two-stage) disk-type drag pump which works in the pressure range from 4 to 0.003 Torr was studied experimentally, and rotational speed of the pump is 24,000rpm and nitrogen is used as a test ga...
In this paper, the pumping performance of the multi-stage(two-stage) disk-type drag pump which works in the pressure range from 4 to 0.003 Torr was studied experimentally, and rotational speed of the pump is 24,000rpm and nitrogen is used as a test gas. An experimental study on pumping characteristics of various multi-stage disk-type drag pump is performance. The inlet pressures are measured for various outlet pressures of teat pump. The maximum compression ratios for nitrogen are 1000(multi-stage disk-type drag pump), 740(helical-type drag pump), 90(BSC disk-type drag pump) and 85(OSC disk-type drag pump), respectively. The ultimate pressure of the multi-stage disk-type drag pump is 3.7×10-5 Torr at 0.003 Torr for outlet pressure. The maximum value of compression ratio is 1000 at 0.6 Torr for outlet pressure.