RF 집적회로를 위한 0.18 μm CMOS 표준 디지털 공정 기반 인덕터 라이브러리 = Inductor Library for RF Integrated Circuits in Standard Digital 0.18-μm CMOS Technology

다국어 초록 (Multilingual Abstract)

An inductor library for efficient low cost RFIC design has been developed based on a standard digital 0.18 μm CMOS process. The developed library provides four structural variations that are most popular in RFIC design; standard spiral structure, patterned ground shield(PGS) structure to enhance quality factor, stacked structure to enable high inductance values in a given silicon area, multilayer structure to lower series resistance. Electromagnetic simulation, equivalent circuit, and parameter extraction processes have been verified based on measurement results. The extensive measurement and simulation results of the inductor library can be a great asset for low cost RFIC design and development.

참고문헌 (Reference)

1 S. M. Yim, "The effects of a ground shield on spiral inductors fabricated in a silicon bipolar technology" 2000

2 A. Zolfaghari, "Stacked inductors and transformers in CMOS technology" 36 : 620-628, 2001

3 C. Patrick Yue, "Physical modeling of spiral Inductors on silicon" 47 (47): 560-568, 2000

4 C. P. Yue, "On-chip spiral inductors with patterned ground shields for Si-based RF IC’s" 33 : 743-752, 1998

5 B. -H. Park, "Low-power, low-phase- noise CMOS voltage-controlled oscillator with integrated LC resonator" 4 : 378-381, 1998

6 J. N. Burghartz, "Integrated RF and microwave components in BiCMOS" 43 (43): 1559-1569, 1996

7 "HFSS (High Frequency Structure Simulator), version10"

8 H. A. Wheeler, "Formulas for the skin effect" 30 : 412-424, 1942

9 "Dongbu Electronics Generic Logic 0.18 μm 1P6M Spice model manual"

10 C. Lam, "A 2.6 GHz/5.2 GHz CMOS voltage-controlled oscillator" 402-403, 1999

11 T. P. Liu, "6.5 GHz monolithic CMOS voltage- controlled oscillator" 404-405, 1999