Faraday cup array 개발을 위한 Particle Beam Mass Spectrometer 시스템 내에서의 입자 확산 연구 = A Study on Particle Diffusion to Develop Faraday Cup Array of Particle Beam Mass Spectrometer System

다국어 초록 (Multilingual Abstract)

The Faraday cup electrode of different size has been developed and evaluated to investigate the diffusion effect of particles by Brownian motion in a particle beam mass spectrometer(PBMS). Particles which focused and accelerated by aerodynamic lens are charged to saturation in an electron beam, and then deflected electrostatically into a Faraday cup detector for measurement of the particle current. The concentration of particles is converted from currents detected by Faraday cup. Measurements of particle current as a function of deflection voltage are combined with measured relationships between particle velocity and diameter, charge and diameter, and mass and diameter, to determine the particle size distribution. The particle currents were measured using 5, 10, 20, 40 ㎜ sized Faraday cup that can be move to one direction by motion shaft. The current difference for each sizes as a function of position was compared to figure out diffusion effect during transport. Polystyrene latex(PSL) 100, 200 ㎚ sized standard particles were used for evaluation. The measurement using 5 ㎜ sized Faraday cup has the highest resolution in a diffusion distance and the smaller particles had widely diffused.

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