RISS 학술연구정보서비스

검색
다국어 입력

http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.

변환된 중국어를 복사하여 사용하시면 됩니다.

예시)
  • 中文 을 입력하시려면 zhongwen을 입력하시고 space를누르시면됩니다.
  • 北京 을 입력하시려면 beijing을 입력하시고 space를 누르시면 됩니다.
닫기
    인기검색어 순위 펼치기

    RISS 인기검색어

      SCI SCIE SCOPUS

      Transient effects caused by pulsed gas and liquid injections into low pressure plasmas

      한글로보기

      https://www.riss.kr/link?id=A107589147

      • 0

        상세조회
      • 0

        다운로드
      서지정보 열기
      • 내보내기
      • 내책장담기
      • 공유하기
      • 오류접수

      부가정보

      다국어 초록 (Multilingual Abstract)

      <P>The fast injection of liquid droplets into a glow discharge causes significant time variations in the pressure, the chemical composition of the gas and the phases present (liquid and/or solid along with gas). While the variations can be large...

      <P>The fast injection of liquid droplets into a glow discharge causes significant time variations in the pressure, the chemical composition of the gas and the phases present (liquid and/or solid along with gas). While the variations can be large and important, very few studies, especially kinetic studies, have been published. In this paper we examine the changes brought about in argon plasma by injecting Ar (gas), N<SUB>2</SUB> (gas) hexane (gas) and hexane (liquid droplets). The changes in the RF capacitively coupled power (forward and reflected), electron and ion density (<I>n</I><SUB>e</SUB>, <I>n</I><SUB>i</SUB>), electron temperature (<I>T</I><SUB>e</SUB>) and optical emissions were monitored during the injections. It was found that the Ar injection (pressure change only) caused expected variations. The electron temperature reduced, the plasma density increased and the optical emission intensity remained nearly constant. The N<SUB>2</SUB> and hexane gas injections (chemical composition and pressure changes) also followed expected trends. The plasma densities increased and electron temperature decreased while the optical emissions changed from argon to the injected gas. These all serve to highlight the fact that the injection of evaporating hexane droplets in the plasma caused very little change. This is because the number of injected droplets is too small to noticeably affect the plasma, even though the shift in the chemical composition of the gas caused by evaporation from those same droplets can be very significant. The net conclusion is that using liquid droplets to inject precursors for low pressure plasmas is both feasible and controllable.</P>

      더보기

      분석정보

      View

      상세정보조회

      0

      Usage

      원문다운로드

      0

      대출신청

      0

      복사신청

      0

      EDDS신청

      0

      동일 주제 내 활용도 TOP

      더보기

      주제

      연도별 연구동향

      연도별 활용동향

      연관논문

      연구자 네트워크맵

      공동연구자 (7)

      유사연구자 (20) 활용도상위20명

      이 자료와 함께 이용한 RISS 자료

      나만을 위한 추천자료

      해외이동버튼