The pneumatic vibration isolator is economical, has no risk of contamination, and attains high vibration isolationperformance by lowering the natural frequency. Pressure feedback control is used to improve the response speed of thepneumatic vibration ...
The pneumatic vibration isolator is economical, has no risk of contamination, and attains high vibration isolationperformance by lowering the natural frequency. Pressure feedback control is used to improve the response speed of thepneumatic vibration isolator and keep the internal pressure of the pneumatic actuator constant. In this paper, the vibrationisolator was actively controlled by estimating the internal pressure of the pneumatic actuator with the displacement signal. Apneumatic actuator was modeled and its dynamic characteristics were identified through frequency responsemeasurements. A pressure observer based on relative displacement was designed, and the observer control gain wasadjusted with nominal model and experiments. Pressure estimation performance and active vibration suppressionperformance using a pressure observer were verified through experiments. The pressure of the pneumatic actuator wasestimated by the observer, and measurement noise was eliminated effectively. In addition, vibration isolation performancesof direct and estimated pressure feedback showed no difference, verifying the effectiveness of the pressure observer.