Pulsed Electrochemical Deposition for 3D Micro Structuring

다국어 초록 (Multilingual Abstract)

In this paper, micro structuring technique using localized electrochemical deposition (LECD) with ultra short pulses was investigated. Electric field in electrochemical cell was localized near the tool tip end region by applying pulses of a few hundreds of nano second duration. Pt-Ir tip was used as a counter electrode and copper was deposited on the copper substrate in mixed electrolyte of 0.5 M CUSO₄ and 0.5 M H₂SO₄. The effectiveness of this technique was verified by comparison with ECD using DC voltage. The deposition characteristics such as size, shape, surface, and structural density according to applied voltage and pulse duration were investigated. The proper condition was selected based on the results of the various experiments. Micro columns less than 10 ㎛ in diameter were fabricated using this technique. The real 3D micro structures such as micro spring and micro pattern were made by the presented method.

목차 (Table of Contents)

• 1. Introduction
• 2. LECD using ultra short pulses
• 3. Experimental results
• 4. Micro structuring by LECD
• 5. Conclusions
• REFERENCES

참고문헌 (Reference)

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