비점수차법을 이용한 초정밀변위측정법 연구

다국어 초록 (Multilingual Abstract)

The displacement sensor using optical pickup head is presented. The measuring principle of optical pickup head in focusing direction is adopted to measure displacement. The preliminary tests were carried out to verify the feasibility of the optical pickup head as a displacement sensor and optical pickup head showed about 8 ㎛ measuring range and 10㎚ resolution. The methodology to expand measuring range is proposed and proved its validity. The proposed displacement sensors are applied to AFM(Atomic Force Microscope) probe head to measure the deflection of micro-cantilever.

참고문헌 (Reference)

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3 Wright, F. E., "The Methods of Petrographic-microscopic Research,Their Relative Accuracy" Carnegie Institution of Washington 204-, 1911

4 Soo Chang Choi, "Self Displacement Sensing (SDS) Nano Stage" 한국정밀공학회 8 (8): 70-74, 2007

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6 Lee, S. H., "Magnetic Manipulation of a Microcantilever for a New Concept in Atomic Force Microscopy" 43 (43): 2737-2739, 2007

7 Yusuke Saito, "A Single Lens Micro-Angle Sensor" 한국정밀공학회 8 (8): 14-19, 2007