준정적오차의 측정을 위한 레이저 간섭계의 적용 = A Study on the Adaptation of Laser Interferometer for Meassuring Quasi-static Error

다국어 초록 (Multilingual Abstract)

As the accuracy of manufactured goods needed high-accuracy processing has made the efficiency of NC and measurment technology develop, the innovation of machine tools has influence the development of the semi-conductor and optical technology. We can mention that a traction role of the acceleration for the development like that depends on the development of the measurement technics-Stylus instrument method, STM, SEM, Laser interferometer method-which are used for measuring the movement accuracy of machine tools. The movement error factors in movement accuracy are expressed as yaw, roll, and pitch etc. These studies have not been considered of the problem about the mechanical strength in the case of machining center.
Therefore, we will try to help to factory by measuring, analysising, and displying the deflection of the table or lineat guide on loading after inspecting the influence of load in the position accuracy and measuring the position accuracy of X-Y table for loading. The acceleration of the performance of machine tools influences the development of the semi-conductor and optical technology as the development of NC and measurement technology.

목차 (Table of Contents)

• 1.서론
• 2. 레이저 간섭계의 이론적 해석
• 2.1 레이저 간섭계
• 1) 레이저 간섭계를 이용한 거리 측정의 원리
• 2) 레이저 간섭계를 이용한 각도 측정의 원리
• 3) 분위기 변화에 의한 레이저 간섭계의 오차
• 4) 여현오차
• 2.2 머시닝 센터의 준정적 오차
• 3. 실험장치 및 방법
• 3.1 실험장치
• 3.2 실험방법
• 4. 실험결과 및 고찰
• 4.1 위치결정 정밀도
• 4.2 진직도 보상전 하중에 의한 테이블의 처짐
• 4.3 진직도 보상후 하중에 의한 테이블의 처짐
• 5.결론