Plasma generation and control technologies for development of inorganic/organic hybrid devices have been developed with multiple low-inductance antenna (LIA) modules, as a promising candidate of ultra-large-area and high-density plasma sources for nex...
Plasma generation and control technologies for development of inorganic/organic hybrid devices have been developed with multiple low-inductance antenna (LIA) modules, as a promising candidate of ultra-large-area and high-density plasma sources for next-generation processing of hybrid flexible devices. Properties of argon-oxygen mixture plasmas sustained with multiple LIA units have been investigated and surface modifications of polymer substrates using the plasmas have been carried out. Ion energy distribution at the sheath edge of the argon-oxygen mixture plasmas showed considerable suppression of ion energies as small as or less than 10 eV. Effects of plasma exposure on surface modification and/or degradation of polymers have been examined using hard x-ray photoelectron spectroscopy (HXPES) in terms of chemical bonding states of the polymer surface.