자기 베어링 주축시스템의 유도형 센서 개발 = Development of Inductive Sensor in Magnetic Bearing Spindle System

다국어 초록 (Multilingual Abstract)

In a high speed spindle system, it is very important to monitor the operation of the spindle to prevent catastrophic damage to the system. Widely used sensors for monitoring are eddy-current and capacitive types. These sensors provide high accuracy of monitoring, but their steep prices lead to expensive high speed spindle system. The main goal of our research is to develop technology to produce high speed spindle system utilizing magnetic bearings. As active magnetic bearings require position sensors for feedback control, a noncontact position sensor is being developed as a part of this main goal. Once developed, it will contribute to affordable high speed spindle system. In this paper, we report the selection process of the sensor types and the experimental results with driving circuits.