Three dimensional surface topography : measurement, interpretation, and applications : a survey and bibliography

목차 (Table of Contents)

• CONTENTS
• Part Ⅰ : Instruments and Measurement Techniques of 3-Dimensional Surface Topography / W P Dong ; E Mainsah ; P J Sullivan ; K J Stout = 1
• 1.1 Introduction = 3
• 1.1.1 3-D, Areal, and Parametric Measurement = 4
• 1.1.2 History of Surface Measurement = 4
• 1.2 Differences in the Measurement and Analysis Methods for 2-D and 3-D Surface Topograpgy = 6
• 1.3 Stylus Instruments = 10
• 1.3.1 Mechanism of 3-d Measurement = 10
• 1.3.2 Construction of the Profile System = 13
• 1.3.3 Stylus 3-D systems = 17
• 1.4 Optical Instruments = 19
• 1.4.1 focus Detection Instruments = 19
• 1.4.1.1 Intensity Detection Method = 21
• 1.4.1.2 Differential Detection Method = 23
• 1.4.1.3 Critical Angle Method = 23
• 1.4.1.4 Astigmatic Method = 24
• 1.4.1.5 Foucault Method = 25
• 1.4.1.6 Skew Beam Method = 26
• 1.4.1.7 Defect-of-Focus Detection Methods = 30
• 1.4.1.8 Confocal Method = 28
• 1.4.1.9 Properties of focus Detection Methods = 30
• 1.4.2 Interferometric Instruments = 32
• 1.4.2.1 Phase Shifting Interferometric Instruments = 34
• 1.4.2.2 Scanning Differential Interferometric Instrument = 37
• 1.4.2.3 Properties of Interferometric Instruments = 39
• 1.5 Non-Optical Scanning Microscopy = 41
• 1.5.1 Electron Microscopy = 41
• 1.5.1.1 Stereopair Technique for Quantizing SEM Images = 43
• 1.5.1.2 Direct Integration for Quantizing SEM images = 45
• 1.5.1.3 Properties of Electron Microscopy = 46
• 1.5.2 Scanning Probe Microscope = 46
• 1.5.2.1 Scanning Tunnelling Microscope = 48
• 1.5.2.2 Atomic Force Microscope = 50
• 1.5.2.3 Properties of STM and AFM = 53
• 1.5.2.4 Scanning Capacitance Microscopy = 54
• 1.6 General Comments on the Different Types of Instruments = 58
• 1.6.1 Measurement Range and Resolution = 58
• 1.6.2 Measurement Speed = 60
• 1.6.3 Problems = 60
• 1.6.4 Application Areas = 61
• 1.7 Conclusions = 63
• Part Ⅱ : Three-Dimensional Surface topography - Review of Present and Future Trends / W P Dong ; E Mainsah ; K J Stout ; P J Sullivan = 65
• 2.1 Introduction = 67
• 2.2 Aims of the Survey = 68
• 2.3 Main Findings of the Survey = 69
• 2.3.1 3-D Versus 2-D Analysis = 69
• 2.3.2 The Scope of Surface Topography = 69
• 2.3.3 Instrumentation = 70
• 2.3.3.1 Stylus-based Systems = 70
• 2.3.3.2 Optical Systems = 70
• 2.3.3.3 The Scanning Microscope = 72
• 2.3.4 Digitisation ― Range and Resolution = 73
• 2.3.5 Levelling of Stages = 73
• 2.3.6 Specimen Relocation = 74
• 2.3.7 Measurement Datum Plane definition = 76
• 2.3.8 Static and Dynamic Measurement = 76
• 2.3.9 Data Logging Conditions = 77
• 2.3.10 digital Filtering = 77
• 2.3.11 Characterisation Reference datum Plane = 78
• 2.3.12 Characterisation and Parameters = 78
• 2.3.12.1 Statistical Characterisation = 79
• 2.3.12.2 Characterisation Via spectral Analysis = 79
• 2.3.12.3 Time Series Analysis = 79
• 2.3.12.4 Functional Characterisation = 80
• 2.3.12.5 Visual Inspection = 83
• 2.3.12.6 Fractal Characterisation = 83
• 2.3.13 Parameter Rash? = 83
• 2.4 Conclusions = 84
• Part Ⅲ : Visualisation Techniques and A primary Parameter Set for Characterising three-Dimensional Surface Topography / W P Dong ; N L Luo ; P J Sullivan ; K J Stout
• Nomenclature = 89
• 3.1 Introduction = 90
• 3.2 Surface Topography in Three-dimensions = 91
• 3.3 Reference Datum for Topographic Analysis = 91
• 3.4 Visualisation Techniques = 92
• 3.4.1 Visualisation Plots = 93
• 3.4.1.1 Isometric plot = 93
• 3.4.1.2 Contour Plot = 95
• 3.4.1.3 Greyscale Image = 97
• 3.4.2 Manipulation Techniques = 98
• 3.4.2.1 Inversion = 98
• 3.4.2.2 Truncation = 98
• 3.4.2.3 Zooming and Clipping = 100
• 3.4.2.4 Surface Image Enhancement = 101
• 3.5 Specification of the Parameters = 103
• 3.6 A Primary Parameter Set = 103
• 3.6.1 Amplitude and Height Distribution Parameters = 104
• 3.6.1.1 Root-Mean-Square Deviation $$\mathop S_q$$ = 104
• 3.6.1.2 Ten Point Height of the Surface $$\mathop S_z$$ = 104
• 3.6.1.3 Skewness of Surface Height Distribution $$\mathop S_{sk}$$ = 106
• 3.6.1.4 Kurtosis of Surface Height Distribution $$\mathop S_{ku}$$ = 106
• 3.6.2 Spatial Parameters = 106
• 3.6.2.1 Density of Summits of the Surface $$\mathop S_{ds}$$ = 107
• 3.6.2.2 Texture Aspect Ratio of the Surface $$\mathop S_{tr}$$ = 108
• 3.6.2.3 Texture Direction of the Surface $$\mathop S_{td}$$ = 113
• 3.6.2.4 Fastest decay autocorrelation length $$\mathop S_{al}$$ = 114
• 3.6.3 Hybrid Parameter = 115
• 3.6.3.1 Root-Mean Square Slope of the Surface $$\mathop s_{\Delta q}$$ = 115
• 3.6.3.2 Arithmetic Mean Summit Curvature of the Surface $$\mathop S_{sc}$$ = 115
• 3.6.3.3 developed Interfacial Area Ratio $$\mathop S_{dr}$$ = 116
• 3.6.4 Functional Parameters for Characterising Bearing and Fluid retention Properties = 118
• 3.6.4.1 Surface Bearing Index $$\mathop S_{bi}$$ = 119
• 3.6.4.2 Core Fluid Retention Index $$\mathop S_{ci}$$ = 119
• 3.6.4.3 Valley Fluid Retention Index $$\mathop S_{vi}$$ = 119
• 3.7 Conclusions = 121
• Part Ⅳ : Applications of Three-Dimensional Surface Metrology / W P Dong ; L Blunt ; K J Stout ; P J Sullivan = 123
• 4.1 Introduction = 125
• 4.2 Measurement of A Gear Surface with the Stylus Lead Screw Driven Instrument = 128
• 4.2.1 Instrument and Topography Measurement of A Gear Surface = 129
• 4.2.2 Characterisation of the Gear Surface = 129
• 4.3 Measurement of An Engine Bore Surface with the Stylus Linear Motor Driven Instrumen = 133
• 4.3.1 Instrument and Topography Measurement of An Engine bore Surface = 134
• 4.3.2 Characterisation of the Engine Bore Surface = 135
• 4.4 Measurement of Thick Film Superconductors with the Focus Detection Instrument = 137
• 4.4.1 Instrumentation = 138
• 4.4.2 Fabrication of the Thick Film Superconductors = 139
• 4.4.3 Topography of the Thick Film Superconductors = 139
• 4.5 Measurement of Human Skin with A Focus Detection Instrument = 143
• 4.5.1 Replication of Surfaces = 144
• 4.5.2 Topography of the Skin Surface = 144
• 4.6 Measurement of the topography of Hip Prostheses Using Phase Shifting Interferometer = 145
• 4.6.1 Instrument and Topography Measurement of Hip Prosthesis Surfaces = 147
• 4.6.2 Characterisation of the Hip Joint Surfaces = 147
• 4.7 Measurement of Polished Brass Surface Using a Scanning Tunnelling Microscope = 149
• 4.7.1 Instrument and Surface Measurement of a Polished Brass Surface = 150
• 4.7.2 Topography of the Polished Brass Surface = 151
• 4.8 Characterisation of Surface Topography of Indentations = 153
• 4.8.1 Visual Characterisation = 154
• 4.8.2 Numerical Charcaterisation = 160
• 4.9 Conclusions = 163
• Appendix la : Technical Specification of Some 3D Topography Instruments = 165
• 1A.1 : Stylus-based Contacting Systems = 165
• 1A.1.1. 3-D Automated Surface Topography Analysis System(ASTA) = 165
• 1A.1.2. Perthometer S8P = 167
• 1A.1.3. Surfcom 475／575-3D = 169
• 1A.1.4. Surfascan 3-D = 172
• 1A.1.5. Form Talysurf Series = 175
• 1A.2 : Optical and Other Non-contacting Systems = 177
• 1A.2.1. Micromap = 512
• 1A.2.2 Wyko Topo-3D = 180
• 1A.2.3 Wyko RST = 182
• 1A.2.4 UBM Optical Surface Measurement System = 184
• 1A.2.5. Rodenstock RM-600 3-D = 187
• 1A.2.6. Scanning Force Microscope(SFM) = 189
• 1A.2.7. Maxim 3-D Model 5700 = 190
• 1A.2.8. MP2000 = 193
• 1A.2.9. Proscan 1000 = 195
• Appendix 2a : Survey Analysis = 199
• Part Ⅴ Bibliography = 205
• Part Ⅰ = 205
• Part Ⅱ = 220
• Part Ⅲ = 223
• Part Ⅳ = 226
• Index = 229