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    마이크로웨이브로 증폭된 습식 에칭에 의한 표면 개질 마이카의 제조와 특성 = Preparation and Characterization of Surface Modified Mica by Microwave-enhanced Wet Etching

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    https://www.riss.kr/link?id=A106170523

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    In this study we successfully altered the structural characteristics of the mica surface and were able to control oil-absorption by using the microwave enhanced etching (MEE) technique, which has originally been used in semiconductor industry. When microwave energy is applied to the mica, the surface of the mica is etched in a few minutes. As the result of etching, oil-absorption of the mica was enhanced and surface whiteness was improved by modifying the silicon dioxide layer. Additionally, the high whiteness was maintained even though the etched mica absorbed the sebum or sweat. The surface modification of mica was performed by microwave irradiation after the treatment of hydrofluoric acid. The degree of etching was regulated by acid concentration, irradiation time, the amount of energy and slurry concentration. The surface morphology of the etched mica appears to be the shape of the ‘Moon'. The characteristics of surface area and roughness were examined by Brunauer-Emmett-Teller (BET) surface area analysis, atomic force microscopy (AFM), scanning electron microscopy (SEM), spectrophotometer and goniophotometer.
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    In this study we successfully altered the structural characteristics of the mica surface and were able to control oil-absorption by using the microwave enhanced etching (MEE) technique, which has originally been used in semiconductor industry. When mi...

    In this study we successfully altered the structural characteristics of the mica surface and were able to control oil-absorption by using the microwave enhanced etching (MEE) technique, which has originally been used in semiconductor industry. When microwave energy is applied to the mica, the surface of the mica is etched in a few minutes. As the result of etching, oil-absorption of the mica was enhanced and surface whiteness was improved by modifying the silicon dioxide layer. Additionally, the high whiteness was maintained even though the etched mica absorbed the sebum or sweat. The surface modification of mica was performed by microwave irradiation after the treatment of hydrofluoric acid. The degree of etching was regulated by acid concentration, irradiation time, the amount of energy and slurry concentration. The surface morphology of the etched mica appears to be the shape of the ‘Moon'. The characteristics of surface area and roughness were examined by Brunauer-Emmett-Teller (BET) surface area analysis, atomic force microscopy (AFM), scanning electron microscopy (SEM), spectrophotometer and goniophotometer.

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    참고문헌 (Reference)

    1 S. Bouffard, "Swife heavy ions in matter conferences: SHIM 92" 126 : 225-, 1993

    2 J.C.P. Broekhoff, "Studies on pore systems in catalysts: XIV. Calculation of the cumulative distribution functions for slit-shaped pores from the desorption branch of a nitrogen sorption isotherm" 10 : 391-, 1968

    3 "Standard practice for goniophotometry of objects and materials, ASTM E 167, American Society for Testing and Materials, West Conshohocken, PA (1995)"

    4 S. A. Durrani, "Solid state nuclear track detection" Pergamon 1987

    5 M. Kang, "Simple and fast microwave-enhanced wet etching of SiC particles for electroless Ni-P platin" 161 : 79-, 2002

    6 J. Ackermann, "Scanning force microscopy of heavy-ion tracks" 126 : 213-, 1993

    7 R. Scholz, "Observation of latent heavy-ion tracks in GeS by transmission electron microscopy" 126 : 275-, 1993

    8 R. L. Fleischer, "Nuclear tracks in solids" University of California 1975

    9 R. Spohr, "Ion tracks and microtechnology: principles and applications" Vieweg 1990

    10 L. A. Bursill, "Heavy-ion irradiation tracks in zircon" A62 : 395-, 1990

    1 S. Bouffard, "Swife heavy ions in matter conferences: SHIM 92" 126 : 225-, 1993

    2 J.C.P. Broekhoff, "Studies on pore systems in catalysts: XIV. Calculation of the cumulative distribution functions for slit-shaped pores from the desorption branch of a nitrogen sorption isotherm" 10 : 391-, 1968

    3 "Standard practice for goniophotometry of objects and materials, ASTM E 167, American Society for Testing and Materials, West Conshohocken, PA (1995)"

    4 S. A. Durrani, "Solid state nuclear track detection" Pergamon 1987

    5 M. Kang, "Simple and fast microwave-enhanced wet etching of SiC particles for electroless Ni-P platin" 161 : 79-, 2002

    6 J. Ackermann, "Scanning force microscopy of heavy-ion tracks" 126 : 213-, 1993

    7 R. Scholz, "Observation of latent heavy-ion tracks in GeS by transmission electron microscopy" 126 : 275-, 1993

    8 R. L. Fleischer, "Nuclear tracks in solids" University of California 1975

    9 R. Spohr, "Ion tracks and microtechnology: principles and applications" Vieweg 1990

    10 L. A. Bursill, "Heavy-ion irradiation tracks in zircon" A62 : 395-, 1990

    11 S. J. Pearton, "Enhanced etch rates of tri-level resist stacks in microwave discharges" 8 : 1905-, 1993

    12 F. Thibaudau, "Atomic-force-microscopy observations of tracks induced by swift Kr ions in mica" 67 : 1582-, 1991

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    학술지 이력

    학술지 이력
    연월일 이력구분 이력상세 등재구분
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    2021-01-01 등재 등재학술지 유지 (재인증) KCI등재
    2018-01-01 등재 등재학술지 유지 (등재유지) KCI등재
    2015-01-01 등재 등재학술지 선정 (계속평가) KCI등재
    2013-01-01 등재 등재후보 1차 FAIL (등재후보1차) KCI등재후보
    2012-01-01 등재 등재후보학술지 유지 (기타) KCI등재후보
    2011-01-01 등재 등재후보학술지 유지 (등재후보2차) KCI등재후보
    2010-01-01 등재 등재후보 1차 PASS (등재후보1차) KCI등재후보
    2009-01-01 등재 등재후보학술지 유지 (등재후보1차) KCI등재후보
    2007-01-01 등재 등재후보학술지 선정 (신규평가) KCI등재후보
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    기준연도 WOS-KCI 통합IF(2년) KCIF(2년) KCIF(3년)
    2016 0.45 0.45 0.4
    KCIF(4년) KCIF(5년) 중심성지수(3년) 즉시성지수
    0.35 0.38 0.531 0.02
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