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      2차원 평면상에서 주파수 추출을 위한 2-축 가속도 센서 Simulation = Two-Axis Accelerometer simulation for Measuring the frequency on Two Dimensions

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      https://www.riss.kr/link?id=A102600326

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      This paper is on the modeling of two-axis accelerometer and extraction of their frequency characteristics which is applied surface micro machining for measuring the frequency at two-dimensional plane. In this paper, MEMS which is a field of two-axis accelerometer semiconductor sensors using surface micro machining technology is applied. The proposed accelerometer basic structure is based on the comb driver and movable mass at the two-dimensional plane. The Two-axis accelerometer is adopted as an auto focus system operation of digital camera and application component are implemented by using gyroscope of aviation systems.
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      This paper is on the modeling of two-axis accelerometer and extraction of their frequency characteristics which is applied surface micro machining for measuring the frequency at two-dimensional plane. In this paper, MEMS which is a field of two-axis a...

      This paper is on the modeling of two-axis accelerometer and extraction of their frequency characteristics which is applied surface micro machining for measuring the frequency at two-dimensional plane. In this paper, MEMS which is a field of two-axis accelerometer semiconductor sensors using surface micro machining technology is applied. The proposed accelerometer basic structure is based on the comb driver and movable mass at the two-dimensional plane. The Two-axis accelerometer is adopted as an auto focus system operation of digital camera and application component are implemented by using gyroscope of aviation systems.

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