H2를 첨가한 전자빔의 NF3 가스 분해 특성

다국어 초록 (Multilingual Abstract)

The decomposition of NF3 using only an electron beam, and an electron beam in the presence of hydrogen are assessedin terms of the destruction and removal efficiency (DRE, %). Experiments were conducted at a flow rate of 500LPM.The inlet concentration of NF3 in nitrogen gas was about 1,000ppm, and the concentration of hydrogen ranged from 1,500to 8,000ppm, respectively. Absorbed dose (kGy) and electric current ranged from 33.87 (5mA) to 203.21kGy (30mA).The results in this study indicate that the DRE increased about 35% with hydrogen addition at electric current 30mA.Additionally hydrogen gas played a significant role in the constituents of byproducts.

참고문헌 (Reference)

1 최창용, "첨가제 종류에 따른 NF3 분해 및 부산물 생성에 관한 연구" 한국폐기물자원순환학회 30 (30): 586-591, 2013

2 류재용, "전자빔 기술을 이용한 반도체 공정의 삼불화질소(NF3) 분해" 대한환경공학회 34 (34): 391-396, 2012

3 송창호, "수소 가스를 첨가한 글라이딩 아크 플라즈마의 과불화화합물(PFCs) 가스 분해 특성" 한국조명.전기설비학회 25 (25): 65-70, 2011

4 이광진, "부식 환경에서 SUS304 스테인레스 강의 마모거동" 한국윤활학회 20 (20): 91-96, 2004

5 Ministry of Environment, "Waste gas treatment system for semiconductor process"

6 Radoiu, M. T., "Studies on atmospheric plasma abatement of PFCs" 69 : 113-120, 2004

7 Jeong, S. H., "Studies for discomposing characteristic of PFCs fluid with the plasma torch" 141-146, 2008

8 Niu, X., "NF3decomposition over some metal oxides in the absence of water" 19 (19): 463-467, 2010

9 Xu, X., "NF3 decomposition over Al2O3 reagents without water" 20 (20): 418-422, 2011

10 Wang, Y. F., "Effects of experimental parameters on NF3decomposition fraction in an oxygen-based RF plasma environment" 57 : 1157-1163, 2004

11 박강남, "Ebeam-촉매 Coupling을 이용한 톨루엔 제어 특성 연구" 한국대기환경학회 21 (21): 667-673, 2005

12 Ministry of Environment, "Development of odor of dying wastewater control technology using hybrid system of advanced radical oxidation"

13 Ministry of Environment, "Development of flameplasma scrubber for 1,000 LPM PFCs treatment of semiconductor process" 2010

14 Jang, J. H., "Decomposition of aromatic VOCs in flow reactor by electron beam irradiation" 7 (7): 353-356, 2003

15 Bae, J. S., "Continuous dry process for simultaneous removal of SO2 and NOx in existence of ammonia and water under electron beam irradiation" 8 (8): 693-696, 2004

16 Son, Y. S., "A technique for removing odorous sulfur compounds using an electron beam hybrid system" Konkuk University 2012